Heterogeneously integrated light emitting diodes and photodetectors in the metal-insulator-metal waveguide platform

Abstract We demonstrate heterogeneous integration of active semiconductor materials into the conventional passive metal-insulator-metal (MIM) waveguides to provide compact on-chip light generation and detection capabilities for chip-scale nanophotonic platforms. Depending on its bias conditions, a metal-semiconductor-metal section can function as either emitting diode or photodetector directly connected MIM waveguides. experimentally verify independent combined operations electrically-driven sources photodetectors.